High-cleaning vacuum environment enables etching with high anisotropy and high fidelity
The friction lubrication performance of molybdenum disulfide lubricant was tested by frictional lubrication test and mass spectrometry analysis, and the effective lubrication of the table scanning motion was solved. Ion beam etching is a processing technique that uses the directional motion of an inert gas ion beam to bombard the surface of a test piece, and the atomic layer of the material is continuously milled by physical sputtering to transfer the mask pattern onto the optical substrate. The collimation performance of the ion beam and the high cleanliness vacuum environment of the test piece enable the etching to have high anisotropy, high fidelity, and nanometer-scale resolution. Therefore, ion beam etching has been widely used in modern microelectronic device manufacturing processes and is one of the most effective methods for superfinishing. At present, most of the ion beam etching uses a circular ion source, and the entire test piece is immersed in the ion beam for overall etching. However, for a large area rectangular specimen, it is difficult to ensure the uniformity of the etching with a circular ion source. The National Synchrotron Radiation Laboratory of China University of Science and Technology is developing the first KZ-400 ion beam etching device in China to etch large diameter diffractive optical elements. After investigation and analysis, we selected the bar-shaped radio frequency ion source of Veeco, USA, and used the worktable to perform longitudinal (primary motion) and lateral (secondary motion) two-dimensional scanning motions relative to the ion source to achieve large-area etching. The grating etching area is extended to 400×400). The main part of the device is composed of a vacuum chamber, an ion source placed in a vacuum chamber, a worktable, an ion beam current density detection, and an online etching real-time detection system, among which other components except the ion source are self-developed. This article discusses several vacuum problems encountered in the design of the device.
The main vacuum chamber and the system configuration are arranged in order to facilitate the arrangement and connection of the ion source and other components in the vacuum chamber, and the space is effectively used to make the entire system compact. According to the movement characteristics of the table, the vacuum chamber adopts a square structure and is distributed outside the inner wall. There are well-shaped stiffeners with square flanges at both ends. One end is used to install a single door and the other end is connected to a vacuum pumping system. The system requires a static background vacuum of 5×10. The dynamic vacuum P is about 5×10. During the etching process, the ion source and the neutralizer are required to continuously provide the working gas and part of the reaction gas. The main working gas is Ar. Effective volume, internal surface area, material outgassing rate (after vacuum evacuation for 1 h). Calculated from the above parameters, the required effective pumping speed of the main pump to be equipped is to provide such a large pumping speed at the normal operating pressure, to remove all gases including water vapor, and to ensure cleanliness. The vacuum, and strive for compact structure, small footprint, vibration and noise as low as possible, the use of cryogenic pumps as the main pump system becomes the best choice.
Shearing machine is used for thicker plates, it has movable blade system, use electric cutting instead of gases cutting, more cleaner, low cost, high precision and save steel.
Technical parameters:
1. Thickness:3mmâ€20mm
2. Max length :12â€15M
3. Max cutting width: 900-1200mm
4. Speed for cutting: 8â€10m/min
5. Main power: 30Kw(20mm) 20Kw(18mm) 15Kw(12mm)
6. Moving motor: 5.5Kw
7. Cutting angles: 0.5â€3°
8. Height of platform: 1030mm
9. Workshop dimension: 100 ㎡
10. Servo motor to control the length of the material, 3 pcs PLC Coordinated control
Brand of Electrical components:
1. Touch screen:Delta
2. PLC Delta
3. Relay:schneider
4. Circuit breaker Chint
5. Encoder:omron
6. Bottom schneider
7. Inventor Shihlin
Pictures for machine:
Training and Installation :
1. We offer installation service local in paid, reasonable charge.
2. QT test is welcome and professional.
3. manual and using guide is optional if no visiting and no installation.
Certification and after service:
1. Match the technology standard, ISO producing certification
2. CE certification
3. 12 months warranty since the delivery. Board.
Our advantages:
1. Short delivery period.
2. Effective communication
3. Interface customized.
Shearing Machine,Hydraulic Guillotine Shearing Machine,Cnc Shearing Machine,Angle Shearing Machine
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